NanoLab

Top-tier technology made available to the UCLA community and beyond.

Equipment Portfolio

Vistec EBPG 5000+ES – Electron Beam Writer

Vistec EBPG 5000+ES – Electron Beam Writer

Veeco di Innova Atomic Force Microscope

Veeco di Innova Atomic Force Microscope

Veeco Dektak 150 Surface Profiler

Veeco Dektak 150 Surface Profiler

Ulvac JSP 8000 Metal Deposition Sputter

Ulvac JSP 8000 Metal Deposition Sputter

Ulvac NE 550 Chlorine Etcher

Ulvac NE 550 Chlorine Etcher

Tystar Mini 3600 Furnace

Tystar Mini 3600 Furnace

SVG 8800 Track Coater & Developer

SVG 8800 Track Coater & Developer

Sopra GES5E Elipsometer

Sopra GES5E Elipsometer

SemiTool Spin Rinse Dryer

SemiTool Spin Rinse Dryer

Plasma Etch PE-100 Plasma System

Plasma Etch PE-100 Plasma System

Leica DM2500 Microscope

Leica DM2500 Microscope

Jetlight UV Cleaner

Jetlight UV Cleaner

Jeol JSM 7500F – Field Emission Scanning Electron Microscope

Jeol JSM 7500F – Field Emission Scanning Electron Microscope

Fusion UV Systems LC6B Benchtop Conveyor

Fusion UV Systems LC6B Benchtop Conveyor

Denton Desk V Thin Film Deposition System

Denton Desk V Thin Film Deposition System

CHA Solution Metal Deposition e-Beam

CHA Solution Metal Deposition e-Beam

AST Goniometer

AST Goniometer

Amerimade Wet Bench

Amerimade Wet Bench

ASML PAS 5500/200 – Stepper

ASML PAS 5500/200 – Stepper

YES Vacuum Oven

YES Vacuum Oven

Xiatix Xenon Difluoride Etching System

Xiatix Xenon Difluoride Etching System

Tencor Flexus Stress Tester

Tencor Flexus Stress Tester

Technics Micro-RIE Series 800

Technics Micro-RIE Series 800

Loomis LSD-100

Loomis LSD-100

SCS PDS 2010  Parylene Deposition

SCS PDS 2010 Parylene Deposition

Headway Spin Coater

Headway Spin Coater

Nikon LV150 Microscope

Nikon LV150 Microscope

Fisher & PMC Hotplates

Fisher & PMC Hotplates

Hitachi S4700 SEM

Hitachi S4700 SEM

Modular Process Technology RTP 610

Modular Process Technology RTP 610

BMR Technology PECVD

BMR Technology PECVD

Oxidation Furnace

Oxidation Furnace

LPCVD Nitride – Low Stress

LPCVD Nitride – Low Stress

Nanometrics Nanospec 2100 Thin Film Measuring System

Nanometrics Nanospec 2100 Thin Film Measuring System

G&P Technology Poli 400L

G&P Technology Poli 400L

Carbolite High Temperature Oven

Carbolite High Temperature Oven

VEECO Dimension Icon 3100 Atomic Force Microscope

VEECO Dimension Icon 3100 Atomic Force Microscope

Unaxis DRIE

Unaxis DRIE

Unaxis PECVD

Unaxis PECVD

PFC Sink

PFC Sink

CDE ResMap

CDE ResMap

Steel Solvent Wet Bench

Steel Solvent Wet Bench

Heidelberg DWL 66 LaserWriter

Heidelberg DWL 66 LaserWriter

LogiTech CDP

LogiTech CDP

HF Vapor Etcher

HF Vapor Etcher

ULVAC UNECS-2000 Ellipsometer

ULVAC UNECS-2000 Ellipsometer

Sopra GES5 Ellipsometer

Sopra GES5 Ellipsometer

EDAX Genesis

EDAX Genesis

Denton Discovery 550 Sputterer

Denton Discovery 550 Sputterer

HF-Buffered Oxide Etch

HF-Buffered Oxide Etch

Ulvac NLD-570 Oxide Etcher

Ulvac NLD-570 Oxide Etcher

Wet Bench 8

Wet Bench 8

Wet Bench 7

Wet Bench 7

Wyko NT3300 Optical Profiler

Wyko NT3300 Optical Profiler

Dektak 6 Surface Profile Measuring System

Dektak 6 Surface Profile Measuring System

Savannah ALD

Savannah ALD

Fiji Thermal and Plasma ALD

Fiji Thermal and Plasma ALD

VEECO DI 3100 Atomic Force Microscope

VEECO DI 3100 Atomic Force Microscope

Acid Wet Bench

Acid Wet Bench

SCI Filmtek 2000

SCI Filmtek 2000

LPCVD Low Temperature Oxide

LPCVD Low Temperature Oxide

Dektak8 Profilometer

Dektak8 Profilometer

FEI Nova 600 Nanolab DualBeam SEM/FIB

FEI Nova 600 Nanolab DualBeam SEM/FIB

Tencor Flexus 2320A Stress Tester

Tencor Flexus 2320A Stress Tester

Optical Microscopes

Optical Microscopes

Prometrix Omnimap RS35C

Prometrix Omnimap RS35C

M&M probe station

M&M probe station

Porous Si Etcher

Porous Si Etcher

Tousimis 915B Critical Point Dryer

Tousimis 915B Critical Point Dryer

Polifab STS Multiplex CVD Deposition System

Polifab STS Multiplex CVD Deposition System

LPCVD Silicon Nitride

LPCVD Silicon Nitride

LPCVD Polysilicon

LPCVD Polysilicon

Modular Process Technology RTP-600xp

Modular Process Technology RTP-600xp

Denton Desk II (SEM)

Denton Desk II (SEM)

Sloan SL-1800 E-Beam Evaporator

Sloan SL-1800 E-Beam Evaporator

CVC 601 Sputterer

CVC 601 Sputterer

CHA Mark 40 Evaporator

CHA Mark 40 Evaporator

Logitech PM5 polisher/grinder

Logitech PM5 polisher/grinder

Matrix 105

Matrix 105

Tegal Plasmaline 515 Photoresist Asher

Tegal Plasmaline 515 Photoresist Asher

STS AOE Advanced Oxide Etcher

STS AOE Advanced Oxide Etcher

Oxford Plasmalab 80 Plus

Oxford Plasmalab 80 Plus

Plasma-Therm SLR 770 ICP Chlorine Etcher

Plasma-Therm SLR 770 ICP Chlorine Etcher

Plasma-Therm SLR 770 ICP

Plasma-Therm SLR 770 ICP

Plasma-Therm FDRIE DSE II

Plasma-Therm FDRIE DSE II

Nitrogen-Purged Muffle Furnace

Nitrogen-Purged Muffle Furnace

VWR-Vacuum Oven

VWR-Vacuum Oven

Headway Programmable Spin Coaters

Headway Programmable Spin Coaters

Karl Suss SB6 Wafer Bonder

Karl Suss SB6 Wafer Bonder

Karl Suss MA6 Top and Bottom Side Aligners

Karl Suss MA6 Top and Bottom Side Aligners